+7 (812) 645-08-06
PVD coating machines
select brand
PVD deposition machine / ion beam-assisted - SPECTOR-HT
The SPECTOR-HT is a PVD deposition machine that is assisted with an ion beam. It is capable of achieving optimum levels of productivity...
PVD deposition machine / ion beam-assisted - SPECTOR-HT
The SPECTOR-HT is a PVD deposition machine that is assisted with an ion beam. It is capable of achieving optimum levels of productivity by providing maximum through-put for accurate optical thin films. This machine is specially designed to increase deposition rates, lot sizes and target utilization as well as reduce process time. It is equipped with an innovative tool geometry that significantly enhances the uniformity of the material. A 30% target rate for material usage is significantly improved by the SPECTOR-HT PVD deposition machine.
PVD deposition machine / ion beam-assisted - SPECTOR
Veeco's SPECTOR® Ion Beam Deposition (IBD) Optical Coating System delivers flexibility and precision with performance for virtually every optical thin film fabrication application. It has multiple options in fixtures, target assemblies...
PVD deposition machine / ion beam-assisted - SPECTOR
Veeco's SPECTOR® Ion Beam Deposition (IBD) Optical Coating System delivers flexibility and precision with performance for virtually every optical thin film fabrication application. It has multiple options in fixtures, target assemblies...
PVD deposition machine / ion beam-assisted - NEXUS IBD
This IBAD ion beam assisted PVD deposition machine is developed by VEECO. It is specifically designed to cater applications that include...
PVD deposition machine / ion beam-assisted - NEXUS IBD
This IBAD ion beam assisted PVD deposition machine is developed by VEECO. It is specifically designed to cater applications that include...
PVD deposition machine / ion beam-assisted - NEXUS LDD-IBD
The NEXUS LDD-IBD Ion Beam Deposition System is designed to provide excellent particle control while depositing multiple layers of film structures....
PVD deposition machine / ion beam-assisted - NEXUS LDD-IBD
The NEXUS LDD-IBD Ion Beam Deposition System is designed to provide excellent particle control while depositing multiple layers of film structures. The system is suitable for multiple layers of depositions on EUV mask blanks. It is also applicable for other mask operations that require decreased level of defects and advanced thin films.
The NEXUS LDD-IBD features a production-proven design with the slightest defect density. It functions with good repeatability and uniformity. During operation, it has the capacity to deposit a number of materials in similar chambers.
The NEXUS LDD-IBD features a production-proven design with the slightest defect density. It functions with good repeatability and uniformity. During operation, it has the capacity to deposit a number of materials in similar chambers.
PVD deposition machine / thermal evaporation / thin-film / for optoelectronics - NEXUS TAMR
The Veeco NEXUS TAMR PVD System deposits critical low-loss films that make the optical waveguide of the laser. It provides heated deposition ability of the oxide films...
PVD deposition machine / thermal evaporation / thin-film / for optoelectronics - NEXUS TAMR
The Veeco NEXUS TAMR PVD System deposits critical low-loss films that make the optical waveguide of the laser. It provides heated deposition ability of the oxide films in "dielectric" and "metal modes" of operation.
The product has high level of deposition rates and low optical loss of the tantalum pentoxide and aluminum oxide films. It is because of its innovations.
The system features great dependability and uniformity to help improve process yields. It has higher throughput and uptime for lower expense of ownership.
The product incorporates with a wide range of Veeco technologies.
The product has high level of deposition rates and low optical loss of the tantalum pentoxide and aluminum oxide films. It is because of its innovations.
The system features great dependability and uniformity to help improve process yields. It has higher throughput and uptime for lower expense of ownership.
The product incorporates with a wide range of Veeco technologies.
PVD deposition machine / sputtering / thin-film - GREAT ORION® STAR 8
The Great Orion® Star 8 Hybrid, manufactured by Desun Industries®, is a...
PVD deposition machine / sputtering / thin-film - GREAT ORION® STAR 8
The Great Orion® Star 8 Hybrid, manufactured by Desun Industries®, is a...
PVD deposition machine / magnetron sputtering - GREAT ORION® STAR 8 Hybrid
The GREAT ORION® STAR 8 Hybrid is manufactured by Densun. It is a PVD...
PVD deposition machine / magnetron sputtering - GREAT ORION® STAR 8 Hybrid
The GREAT ORION® STAR 8 Hybrid is manufactured by Densun. It is a PVD...
PVD deposition machine / sputtering / thin-film / vacuum - GREAT ORION® STAR 6
The Great Orion® Star 6 Standard, manufactured by Deslin, is a PVD coater...
PVD deposition machine / sputtering / thin-film / vacuum - GREAT ORION® STAR 6
The Great Orion® Star 6 Standard, manufactured by Deslin, is a PVD coater...
PVD deposition machine / magnetron sputtering - GREAT ORION® STAR 6 Hybrid
The Star 6 Hybrid is a unit manufactured...
PVD deposition machine / magnetron sputtering - GREAT ORION® STAR 6 Hybrid
The Star 6 Hybrid is a unit manufactured by DESUN Industries. It has a volume of 800 and it has an arc source in 6 sets. Its cycle time is in between 4 to 5 hours.
PVD deposition machine / sputtering / thin-film - GREAT ORION® STAR 4
The Great Orion® Star 4 Hybrid, manufactured by Desun Industries®, is a...
PVD deposition machine / sputtering / thin-film - GREAT ORION® STAR 4
The Great Orion® Star 4 Hybrid, manufactured by Desun Industries®, is a...
PVD deposition machine / magnetron sputtering - 46 - 110 kVA | HELIOS, HELIOSpro
The HELIOS sputtering tool is a flexible platform for fast, precise and fully automated thin film coatings. It...
PVD deposition machine / magnetron sputtering - 46 - 110 kVA | HELIOS, HELIOSpro
The HELIOS sputtering tool is a flexible platform for fast, precise and fully automated thin film coatings. It specializes in high quality optical coatings featuring very low absorption and scattering. Unsurpassed optical performance is ensured by the extremely dense, smooth, stoichiometric, and amorphous layers. Ultimate precision in layer growth control is facilitated by an optical monitoring system for in-situ on-substrate measurements.
PVD deposition machine / thermal evaporation / for ophthalmic lenses - 45 - 100 kVA | SYRUSpro series
Leybold Optics SYRUSpro is an industry leader in production and R&D. This machine produces superior coatings at extremely competitive rates. The SYRUSpro is ideal for AR-coating applications such as band pass, notch filters or...
PVD deposition machine / thermal evaporation / for ophthalmic lenses - 45 - 100 kVA | SYRUSpro series
Leybold Optics SYRUSpro is an industry leader in production and R&D. This machine produces superior coatings at extremely competitive rates. The SYRUSpro is ideal for AR-coating applications such as band pass, notch filters or special mirrors. It is equipped with Leybold Optics process control system, which excels by having high flexibility and maximum automation. Combining these attributes with a very broad selection of hardware components, guarantees the best possible adaptation of the systems to meet our customers needs. Optical and/or physical monitoring is used to control the precision of layer thickness. This monitoring results in precise layer growth, high uniformity, and a high production yield.
Leybold Optics SYRUSpro delivers extremely high spectral performance and unparalleled reproducibility at a low cost-per-piece. This performance will result in a more profitable ROI for your company.
Leybold Optics SYRUSpro delivers extremely high spectral performance and unparalleled reproducibility at a low cost-per-piece. This performance will result in a more profitable ROI for your company.
PVD deposition machine / ion beam-assisted / for ophthalmic lenses - ARES series
High productivity, best performance, lowest cost of ownership, production proven... These are the highlights of the ARES family. ARES coating systems have been developed to meet the requirements of Chinese and Asian mass production oriented markets. To be close to our customers in the center of...
PVD deposition machine / ion beam-assisted / for ophthalmic lenses - ARES series
High productivity, best performance, lowest cost of ownership, production proven... These are the highlights of the ARES family. ARES coating systems have been developed to meet the requirements of Chinese and Asian mass production oriented markets. To be close to our customers in the center of the market, providing the tailored solution requested, to react fast and to bring our coating technology to them... this is ARES.
The coating systems of the ARES family focus on lowest cost of ownership, but providing, at the same time, the coating technology for production oriented applications. The machines are derived from the proven designs of the SYRUSpro family, equipped with key components, and with a high content of locally sourced parts, adapted for the specific requirements.
The machines of the ARES family are available in various chamber sizes, from ARES 700, ARES 1100 and 1350 up to high volume production systems ARES 1500 and ARES 2000. A high variety of coating processes can be applied in cost efficient manner in the production. At the same time, ARES coating systems achieve a very good performance on requested coating specifications.
The coating systems of the ARES family focus on lowest cost of ownership, but providing, at the same time, the coating technology for production oriented applications. The machines are derived from the proven designs of the SYRUSpro family, equipped with key components, and with a high content of locally sourced parts, adapted for the specific requirements.
The machines of the ARES family are available in various chamber sizes, from ARES 700, ARES 1100 and 1350 up to high volume production systems ARES 1500 and ARES 2000. A high variety of coating processes can be applied in cost efficient manner in the production. At the same time, ARES coating systems achieve a very good performance on requested coating specifications.
PVD deposition machine / magnetron sputtering - 46 kVA | NESSY II
NESSY II is a second generation magnetron sputter system mainly used for the production of EUV extreme ultraviolet mirrors under UHV conditions. It is designed for mass production as well as...
PVD deposition machine / magnetron sputtering - 46 kVA | NESSY II
NESSY II is a second generation magnetron sputter system mainly used for the production of EUV extreme ultraviolet mirrors under UHV conditions. It is designed for mass production as well as the R&D of new products. The machine can be equipped with up to 6 different rectangular sputter cathodes and uses materials like Mo, Si and diffusion barrier layers. As a result, a complete coating stack can be performed in one cycle. Flat main and sub-rotation, as well as curved substrates, allow the coating to have an extremely high layer thickness uniformity or rotationally symmetric gradient layers.
Fields of applications
EUV coating for collector optics
synchrotrons optics
x-ray astronomy
soft x-ray lasers
plasma physics
Fields of applications
EUV coating for collector optics
synchrotrons optics
x-ray astronomy
soft x-ray lasers
plasma physics
PVD deposition machine / thermal evaporation / thin-film / for optoelectronics - LAB H series
Lift-off applications require special chamber geometries in order to ensure narrow incident angles during deposition processes. Our LAB H family is optimized for these needs, including appropriate substrate holders, pumping systems and, optionally, automatic handling systems for uninterrupted...
PVD deposition machine / thermal evaporation / thin-film / for optoelectronics - LAB H series
Lift-off applications require special chamber geometries in order to ensure narrow incident angles during deposition processes. Our LAB H family is optimized for these needs, including appropriate substrate holders, pumping systems and, optionally, automatic handling systems for uninterrupted operation under vacuum. Moreover, a high degree of flexibility in the configuration of the systems is another highlight of the LAB H series, enabling us to respond to specific customer requests.
Our client list includes world-leading commercial and institutional research departments, as well as manufacturers of electronic components on industrial scale.
Features and Options:
Stainless steel chambers, optionally conditioned for UHV processes
High performance pumping systems, incl. cryogenic pumps, dry pumps
Contamination free substrate heating
Glow discharge plasma cleaning
Customized substrate holders: calotte, pyramid, plane
Tiltable substrate holders, drives
Automated substrate handling, wafer loading / unloading systems
Automatic refill of evaporation material
Our client list includes world-leading commercial and institutional research departments, as well as manufacturers of electronic components on industrial scale.
Features and Options:
Stainless steel chambers, optionally conditioned for UHV processes
High performance pumping systems, incl. cryogenic pumps, dry pumps
Contamination free substrate heating
Glow discharge plasma cleaning
Customized substrate holders: calotte, pyramid, plane
Tiltable substrate holders, drives
Automated substrate handling, wafer loading / unloading systems
Automatic refill of evaporation material