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• PVD deposition machine / magnetron sputtering - 46 - 110 kVA | HELIOS, HELIOSpro

PVD deposition machine / magnetron sputtering - 46 - 110 kVA | HELIOS, HELIOSpro

The HELIOS sputtering tool is a flexible platform for fast, precise and fully automated thin film coatings. It specializes in high quality optical coatings featuring very low absorption and scattering. Unsurpassed optical performance is ensured by the extremely dense, smooth, stoichiometric, and amorphous layers. Ultimate precision in layer growth control is facilitated by an optical monitoring system for in-situ on-substrate measurements.

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