+7 (812) 645-08-06
PVD deposition machine / thermal evaporation / thin-film / for optoelectronics - LAB H series
Lift-off applications require special chamber geometries in order to ensure narrow incident angles during deposition processes. Our LAB H family is optimized for these needs, including appropriate substrate holders, pumping systems and, optionally, automatic handling systems for uninterrupted operation under vacuum. Moreover, a high degree of flexibility in the configuration of the systems is another highlight of the LAB H series, enabling us to respond to specific customer requests.Our client list includes world-leading commercial and institutional research departments, as well as manufacturers of electronic components on industrial scale.
Features and Options:
Stainless steel chambers, optionally conditioned for UHV processes
High performance pumping systems, incl. cryogenic pumps, dry pumps
Contamination free substrate heating
Glow discharge plasma cleaning
Customized substrate holders: calotte, pyramid, plane
Tiltable substrate holders, drives
Automated substrate handling, wafer loading / unloading systems
Automatic refill of evaporation material