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• PVD deposition machine / thermal evaporation / thin-film / for optoelectronics - NEXUS TAMR

PVD deposition machine / thermal evaporation / thin-film / for optoelectronics - NEXUS TAMR

The Veeco NEXUS TAMR PVD System deposits critical low-loss films that make the optical waveguide of the laser. It provides heated deposition ability of the oxide films in "dielectric" and "metal modes" of operation.

The product has high level of deposition rates and low optical loss of the tantalum pentoxide and aluminum oxide films. It is because of its innovations.

The system features great dependability and uniformity to help improve process yields. It has higher throughput and uptime for lower expense of ownership.

The product incorporates with a wide range of Veeco technologies.

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