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Thermal mass flow meters and flow controllers
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Thermal mass flow controller / for gas - max. 450 kPa, max. 200 slm | SEC-Z500X series
HORIBA STE is a renowned brand in manufacturing of high-quality, highly functional semi-conductors. The company holds to its credit over 35%*1 of worldwide market share. The revolutionized Z500X series is a new mass flow controller recently introduced by the company. The mass...
Thermal mass flow controller / for gas - max. 450 kPa, max. 200 slm | SEC-Z500X series
HORIBA STE is a renowned brand in manufacturing of high-quality, highly functional semi-conductors. The company holds to its credit over 35%*1 of worldwide market share. The revolutionized Z500X series is a new mass flow controller recently introduced by the company. The mass flow controller is a high quality semiconductor manufacturing equipment. The success or failure of semiconductor manufacturing process depends up on the quality and efficiency of the controller.
The new series is designed to completely break the mold and bring about new changes in the future of mass flow control technology. The series provides the customers with all the required mass flow functions including flexibility to handle different gas types and flow volumes. With Z500X series, the users can flexibly alter its specification to match the changing needs *2. The RoHS compliance series serves as the perfect environmentally friendly tool to enhance corporate value. The new mass flow controller is designed to change the future of the semiconductor industry.
The new series is designed to completely break the mold and bring about new changes in the future of mass flow control technology. The series provides the customers with all the required mass flow functions including flexibility to handle different gas types and flow volumes. With Z500X series, the users can flexibly alter its specification to match the changing needs *2. The RoHS compliance series serves as the perfect environmentally friendly tool to enhance corporate value. The new mass flow controller is designed to change the future of the semiconductor industry.
Thermal mass flow meter / for gas - max. 750 kPa, max. 10 slm | CRITERION D500 series
The Criterion D500 from Horiba is a pressure insensitive mass flow module that is specially engineered...
Thermal mass flow meter / for gas - max. 750 kPa, max. 10 slm | CRITERION D500 series
The Criterion D500 from Horiba is a pressure insensitive mass flow module that is specially engineered with G-LIFE Selfe-Diagnosis Function that allows users to conduct tests rapidly. Upstream and downstream pressure changes do not affect the gas flow control of this unit.
It features a sensor for differential pressure and guarantees high flow rate accuracy during operations.
It features a sensor for differential pressure and guarantees high flow rate accuracy during operations.
Thermal mass flow controller / for gas - max. 350 kPa, max. 10 slm | CRITERION D200 series
The Mass Flow Module from HORIBA Semiconductors features the latest cutting edge differential...
Thermal mass flow controller / for gas - max. 350 kPa, max. 10 slm | CRITERION D200 series
The Mass Flow Module from HORIBA Semiconductors features the latest cutting edge differential pressure detection with high accuracy from 3D mapping.
With this module, gas flow control is unaffected by any upstream or downstream pressure fluctuations. It also ensures improved process yield by supplying standard flow rate to the semiconductor process.
With this module, gas flow control is unaffected by any upstream or downstream pressure fluctuations. It also ensures improved process yield by supplying standard flow rate to the semiconductor process.
Thermal mass flow controller / for gas - max. 300 kPa, max. 50 slm | SEC-8000 series
The SEC-8000F/D Series from HORIBA STEC is an ideal choice for anyone needing a digital mass flow controller with a...
Thermal mass flow controller / for gas - max. 300 kPa, max. 50 slm | SEC-8000 series
The SEC-8000F/D Series from HORIBA STEC is an ideal choice for anyone needing a digital mass flow controller with a...
Thermal mass flow meter / cost-effective - max. 200 slm | SEC-400 series
HORIBA's Mass flow controllers SEC-400 series has continued to produce and develop mass flow controllers since 1980. The SEC-400 series is specifically used through...
Thermal mass flow meter / cost-effective - max. 200 slm | SEC-400 series
HORIBA's Mass flow controllers SEC-400 series has continued to produce and develop mass flow controllers since 1980. The SEC-400 series is specifically used through the aid of thermal valves also has the exact reliability control functionality as compared to SEC-L which already used around the world. The mass flow controllers offers several features which include a high precision device which is fit through a wide range of flow control with a single series available. It is compact due to its 106mm in-between surfaces of type SEC300. It is also a less expensive device with more versions available like the SEC-400MK3/500MK3.
Thermal mass flow meter / for gas
This unit is a Massflow gas measurement control. The unit operates independently...
Thermal mass flow meter / for gas
This unit is a Massflow gas measurement control. The unit operates independently from temperature and pressure, and allows process gas control that is both stable, and can be repreduced. Massflow controllers are constructed with a PID controller and do not contain actuators. They can be used through field bus or norm signal.
Thermal mass flow controller / for gas - 0.005 - 15 lN/min | 8710 series
Bürkert Type 8710 can control the gas mass flow with a sensor component that has no contact with the gas.
A comparison is done in the digital control electronics...
A comparison is done in the digital control electronics...
Thermal mass flow controller / for gas - 0.005 - 15 lN/min | 8710 series
Bürkert Type 8710 can control the gas mass flow with a sensor component that has no contact with the gas.
A comparison is done in the digital control electronics...
A comparison is done in the digital control electronics...
Thermal mass flow controller / for liquids - max. 600 ml/min | 8719 series
Type 8719 liquid flow controller is used in process technology. The measured value of the sensor is compared in the digital control...
Thermal mass flow controller / for liquids - max. 600 ml/min | 8719 series
Type 8719 liquid flow controller is used in process technology. The measured value of the sensor is compared in the digital control with the predefined set point according to the signal. In case of a control difference, the control value output to the proportional valve is modified using a PI-control algorithm. Thus the flow meter can be maintained at fixed value or a predefined profile can be followed as per need irrespective of pressure changes or other disturbances in the system.
Thermal mass flow meter / for gas - max. 80 IN/m | 87xx series
This is a Mass Flow Meter for Gases capable of working in range of 0.005 to 15 lN/min.
Thermal mass flow meter / for gas - max. 1500 lN/min | 8006 series
The Burkert mass flow meter, type 8006 for gases, is a heavy-duty meter for the direct...
Thermal mass flow meter / for gas - max. 1500 lN/min | 8006 series
The Burkert mass flow meter, type 8006 for gases, is a heavy-duty meter for the direct...
Thermal mass flow meter / digital - DMF series
The DWYER'S Series DMF are created as digital mass flow controller. Its is durable and highly efficient in providing flow control with an accuracy...
Thermal mass flow meter / digital - DMF series
The DWYER'S Series DMF are created as digital mass flow controller. Its is durable and highly efficient in providing flow control with an accuracy...
Thermal mass flow controller / for gas - GFC series
Series GFC Gas Mass Flow Controllers are engineered for combining a restrictor flow element with straight tube sensor to attain optimal accuracy and consistent performance. The rate of flow remains the same...
Thermal mass flow controller / for gas - GFC series
Series GFC Gas Mass Flow Controllers are engineered for combining a restrictor flow element with straight tube sensor to attain optimal accuracy and consistent performance. The rate of flow remains the same...
Thermal mass flow meter / for gas - GFM series
The gas flow meters in the GFM series feature a unique combination of straight tube sensors and a restrictor flow element that...
Thermal mass flow meter / for gas - GFM series
The gas flow meters in the GFM series feature a unique combination of straight tube sensors and a restrictor flow element that ensures high repeatability and accuracy. Factors such as pressure and temperature do not affect the flow rates in any way.
The gas flow is displayed in various engineering units, on an LCD display that is tiltable in steps of 90 degrees. The item is suitable for applications that require totalization, while the package includes a traceable certificate, of NIST.
The gas flow is displayed in various engineering units, on an LCD display that is tiltable in steps of 90 degrees. The item is suitable for applications that require totalization, while the package includes a traceable certificate, of NIST.