Thermal mass flow meters and flow controllers

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Sensirion

Thermal mass flow meter / for small quantities - max 80 ml/min | SLI series

The SLI series is manufactured by Sensirion. It is a flow meter series, which provides high accuracy solution for low flow rates of liquids based on water or hydrocarbons, such as alcohols, solvents, oil,...

Thermal mass flow meter / for small quantities - max 80 ml/min | SLI series

The SLI series is manufactured by Sensirion. It is a flow meter series, which provides high accuracy solution for low flow rates of liquids based on water or hydrocarbons, such as alcohols, solvents, oil, fuel, and adhesives.

It is integrated with a thermal microsensor technology, which introduces new perspectives in terms of sensitivity, reliability and speed. The device has a smart digital interface, and a robust RS485 communication for long distance use.

Specifications of the SLI series includes a 3 flow ranges from microliters to milliliters, flow rates of water based liquids of up to 5 ml/min,
hydrocarbon flow rates of up to 80 ml/min, and precision higher than 1% of the measured value. The SLI series has no moving parts, and works in a straight flow path.

Thermal mass flow meter / for hydrocarbons - max. 100 ml/min, SLQ-HC60

The SLQ-HC60 Thermal Mass Flow Meter works with no moving parts and provide the highest accuracy and chemical compatibility. The media has distinct MEMS-based...

Thermal mass flow meter / for hydrocarbons - max. 100 ml/min, SLQ-HC60

The SLQ-HC60 Thermal Mass Flow Meter works with no moving parts and provide the highest accuracy and chemical compatibility. The media has distinct MEMS-based...

Thermal mass flow meter / for hydrocarbons - max. 120 ml/min | SLQ-QT105

The SLQ-QT105 is manufactured by Sensirion, and is a semicon grade-sensor solution for flow rates below 120 ml/min of hydrocarbon based liquids like photo-resists...

Thermal mass flow meter / for hydrocarbons - max. 120 ml/min | SLQ-QT105

The SLQ-QT105 is manufactured by Sensirion, and is a semicon grade-sensor solution for flow rates below 120 ml/min of hydrocarbon based liquids like photo-resists and solvents. It has short response time that permits the accurate monitoring of highly dynamic processes such as fast dosing operations.

The unit is suitable for 4x3 mm PFA tubing, and can work without any moving parts measuring non-invasive through the wall of a straight flow path. It has RS485 digital interface that is provided for long distance and bus capability. It has maximum working pressure of 3 bar, and is available in high pressure ratings that is on request.

Thermal mass flow meter / for HPLC - max. 15 000 psi, max. 20 µl/min | SLG64-0075

The SLG64-0075 is a dynamic flow monitor made for UHPLC applications. This monitor uses highly-sensitive CMOSens® microchip that is located in the fused silica channel...

Thermal mass flow meter / for HPLC - max. 15 000 psi, max. 20 µl/min | SLG64-0075

The SLG64-0075 is a dynamic flow monitor made for UHPLC applications. This monitor uses highly-sensitive CMOSens® microchip that is located in the fused silica channel...

Thermal mass flow meter / for liquids / OEM - max. 20 ml/min | LG16/LG216

The LG16/LG216 series are manufactured by Sensirion. The series are OEM liquid flow sensors, which provide calibrated and digital liquid flow sensing performance. They are pressure resistant...

Thermal mass flow meter / for liquids / OEM - max. 20 ml/min | LG16/LG216

The LG16/LG216 series are manufactured by Sensirion. The series are OEM liquid flow sensors, which provide calibrated and digital liquid flow sensing performance. They are pressure resistant and non invasive sensors, which offer small sized, highly efficient solutions to measure all flow rates below 80 ml/min.

Specifications of the series include, LG16 is for flow rates from nl/min up to 5 ml/min, while LG216 is for flow rates up to 20 ml/min (H2O). They also have totally non-invasive sensing principle, resolutions down to the sub nl-range, and high speed response time of 40 ms.

The series can be used for medical applications, diagnostic devices, vaporizers, environmental testing units, and fuel cell systems.
First Sensor AG (Sensortechnics)

Thermal mass flow meter / for gas - WBI, WBA, WTA

As a leading supplier of custom sensor solutions, First Sensor is utilized for highly sophisticated requirements. First Sensor works together with their customers to develop sensor solutions within various...

Thermal mass flow meter / for gas - WBI, WBA, WTA

As a leading supplier of custom sensor solutions, First Sensor is utilized for highly sophisticated requirements. First Sensor works together with their customers to develop sensor solutions within various markets in the fields of MEMS and OPTO. First Sensor uses in-house manufacturing along the value adding a chain from the component to system level to detect radiation, light, flow, pressure, acceleration and liquid level.

A highly sensitive thermal measuring principle is the basis for the mass flow sensors for gases and air. An extremely high sensitivity is achieved by the sensors across the full measuring range and it also gives rapid response times with low power consumption.

It is commonly used in applications such as HVAC, medical devices, instrumentation and analytical instruments.
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