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• Thermal mass flow controller / for gas - max. 350 kPa, max. 10 slm | CRITERION D200 series

Thermal mass flow controller / for gas - max. 350 kPa, max. 10 slm | CRITERION D200 series

The Mass Flow Module from HORIBA Semiconductors features the latest cutting edge differential pressure detection with high accuracy from 3D mapping.

With this module, gas flow control is unaffected by any upstream or downstream pressure fluctuations. It also ensures improved process yield by supplying standard flow rate to the semiconductor process.

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