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• Thermal mass flow meter / for hydrocarbons - max. 120 ml/min | SLQ-QT105

Thermal mass flow meter / for hydrocarbons - max. 120 ml/min | SLQ-QT105

The SLQ-QT105 is manufactured by Sensirion, and is a semicon grade-sensor solution for flow rates below 120 ml/min of hydrocarbon based liquids like photo-resists and solvents. It has short response time that permits the accurate monitoring of highly dynamic processes such as fast dosing operations.

The unit is suitable for 4x3 mm PFA tubing, and can work without any moving parts measuring non-invasive through the wall of a straight flow path. It has RS485 digital interface that is provided for long distance and bus capability. It has maximum working pressure of 3 bar, and is available in high pressure ratings that is on request.

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