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Vacuum-compatible positioning stages
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Vacuum-compatible positioning stage - max. 274.8 N | SRS-008-04-020-01V
The SRS-008-04-020-01V Model is a vacuum-compatible positioning stage developed by H2W Technologies. It comes with...
Vacuum-compatible positioning stage - max. 274.8 N | SRS-008-04-020-01V
The SRS-008-04-020-01V Model is a vacuum-compatible positioning stage developed by H2W Technologies. It comes with recirculating ball bearing that is lubricated with dry lube film, and a low out gassing lubricant. The unit is equipped with 2 micron encoder resolution, 8.225 in stroke, and a 0.7 msec electrical time constant. In addition, all the machined parts with drilled hole is equipped with ventilation holes to prevent any gasses from getting trapped.
Vacuum-compatible positioning stage
The first design decision for a vacuum motion system is the material of the bearings and structure. Vacuum motion systems are typically made from bare 6061 aluminum and 300 or 400 series Stainless Steel. Machined Aluminum without grinding or polishing so that it does have...
Vacuum-compatible positioning stage
The first design decision for a vacuum motion system is the material of the bearings and structure. Vacuum motion systems are typically made from bare 6061 aluminum and 300 or 400 series Stainless Steel. Machined Aluminum without grinding or polishing so that it does have rolled pockets to trap air or contamination, works well and is the most cost effective material. Depending on the vacuum level even anodized stages can be used in low vacuum applications. (10-3 TORR) Since most precision bearings in vacuum are made from 400 Stainless Steel the use of 300 or 400 SS for the motion system is recommended when thermal variation are part of the application or experiment. This allows for the bearings and structure to deviate at the same rate allowing the bearings to maintain preload.
Other common materials used for motion platforms in vacuum are steel, copper, nickel, titanium and ceramic. All of these material works well with vacuum but some of their thermal coefficients of expansion can make for creative bearing adjustments which may reduce precision.
Other common materials used for motion platforms in vacuum are steel, copper, nickel, titanium and ceramic. All of these material works well with vacuum but some of their thermal coefficients of expansion can make for creative bearing adjustments which may reduce precision.
XY positioning stage / ultra-high vacuum / open-center
Position feedback systems in a vacuum chamber have special designs to insure performance and no outgassing. The styles discussed are three of many approaches but these are tried and proven to perform at single nanometer resolutions in UHV.
Optical encoders, based on reading a physical scale, can resolve down to the nanometer level. Although the scale has a 20 micron pitch, the signal has...
Optical encoders, based on reading a physical scale, can resolve down to the nanometer level. Although the scale has a 20 micron pitch, the signal has...
XY positioning stage / ultra-high vacuum / open-center
Position feedback systems in a vacuum chamber have special designs to insure performance and no outgassing. The styles discussed are three of many approaches but these are tried and proven to perform at single nanometer resolutions in UHV.
Optical encoders, based on reading a physical scale, can resolve down to the nanometer level. Although the scale has a 20 micron pitch, the signal has a sufficient signal to noise ratio to allow it to be interpolated down to the single digit nanometer. (2.5nm to 5 nm resolutions depending on interpolator) These encoders work well for most applications were cost and repeatability is needed.
The next level of performance to an optical encoder with tape or glass scale utilizes a similar read head with a novel scale. Although using the same 20um pitch, it is etched directly into the stainless steel of a ring, for rotary applications, or onto a nickel plated invar spar for linear applications. The Invar scale allows for near laser precision with repeatability and accuracy due to the manufacturing technique of calibrating it with an interferometer. Placing the scale on invar greatly reduces thermal effect that influences the accuracy of other scales.
Beyond optical scale encoders, a laser interferometer can be used to provide resolutions to 38 picometers. This can provide positioning stability, on a suitable mechanical system, to the sub-nanometer levels. Using a plane mirror optical scheme in 2 axes also allows the Abbe error to be eliminated. The added advantage of the interferometer is that only the plane mirror would reside in the vacuum chamber.
Optical encoders, based on reading a physical scale, can resolve down to the nanometer level. Although the scale has a 20 micron pitch, the signal has a sufficient signal to noise ratio to allow it to be interpolated down to the single digit nanometer. (2.5nm to 5 nm resolutions depending on interpolator) These encoders work well for most applications were cost and repeatability is needed.
The next level of performance to an optical encoder with tape or glass scale utilizes a similar read head with a novel scale. Although using the same 20um pitch, it is etched directly into the stainless steel of a ring, for rotary applications, or onto a nickel plated invar spar for linear applications. The Invar scale allows for near laser precision with repeatability and accuracy due to the manufacturing technique of calibrating it with an interferometer. Placing the scale on invar greatly reduces thermal effect that influences the accuracy of other scales.
Beyond optical scale encoders, a laser interferometer can be used to provide resolutions to 38 picometers. This can provide positioning stability, on a suitable mechanical system, to the sub-nanometer levels. Using a plane mirror optical scheme in 2 axes also allows the Abbe error to be eliminated. The added advantage of the interferometer is that only the plane mirror would reside in the vacuum chamber.
Vacuum-compatible positioning stage - max. 2.5 mm/s, 49 N | MVXA05A-R1
Table Size 50mm×50mm
Guide Mechanism Cross-Roller Guide
Motion Range ±7.5mm
Lead Mechanism Ground Screw, Lead 0.5mm
Resolution Full/Half Step 1μm/0.5μm
Resolution Micro...
Guide Mechanism Cross-Roller Guide
Motion Range ±7.5mm
Lead Mechanism Ground Screw, Lead 0.5mm
Resolution Full/Half Step 1μm/0.5μm
Resolution Micro...
Vacuum-compatible positioning stage - max. 2.5 mm/s, 49 N | MVXA05A-R1
Table Size 50mm×50mm
Guide Mechanism Cross-Roller Guide
Motion Range ±7.5mm
Lead Mechanism Ground Screw, Lead 0.5mm
Resolution Full/Half Step 1μm/0.5μm
Resolution Micro...
Guide Mechanism Cross-Roller Guide
Motion Range ±7.5mm
Lead Mechanism Ground Screw, Lead 0.5mm
Resolution Full/Half Step 1μm/0.5μm
Resolution Micro...
Vacuum-compatible positioning stage - max. 2.5 mm/s, 98 N | MVXA07A-R1
Table Size 70mm×70mm
Guide Mechanism Cross-Roller Guide
Motion Range ±10mm
Lead Mechanism Ground Screw, Lead 0.5mm
Resolution Full/Half Step 1μm/0.5μm
Resolution Micro...
Guide Mechanism Cross-Roller Guide
Motion Range ±10mm
Lead Mechanism Ground Screw, Lead 0.5mm
Resolution Full/Half Step 1μm/0.5μm
Resolution Micro...
Vacuum-compatible positioning stage - max. 2.5 mm/s, 98 N | MVXA07A-R1
Table Size 70mm×70mm
Guide Mechanism Cross-Roller Guide
Motion Range ±10mm
Lead Mechanism Ground Screw, Lead 0.5mm
Resolution Full/Half Step 1μm/0.5μm
Resolution Micro...
Guide Mechanism Cross-Roller Guide
Motion Range ±10mm
Lead Mechanism Ground Screw, Lead 0.5mm
Resolution Full/Half Step 1μm/0.5μm
Resolution Micro...
Vacuum-compatible positioning stage - max. 10 mm/s, 196 N | MVXA10A-L2
Table Size 100mm×100mm
Guide Mechanism Linear Guide
Motion Range ±50mm
Lead Mechanism Ball Screw, Lead 2.0mm
Resolution Full/Half Step 4μm/2μm
Resolution Micro...
Guide Mechanism Linear Guide
Motion Range ±50mm
Lead Mechanism Ball Screw, Lead 2.0mm
Resolution Full/Half Step 4μm/2μm
Resolution Micro...
Vacuum-compatible positioning stage - max. 10 mm/s, 196 N | MVXA10A-L2
Table Size 100mm×100mm
Guide Mechanism Linear Guide
Motion Range ±50mm
Lead Mechanism Ball Screw, Lead 2.0mm
Resolution Full/Half Step 4μm/2μm
Resolution Micro...
Guide Mechanism Linear Guide
Motion Range ±50mm
Lead Mechanism Ball Screw, Lead 2.0mm
Resolution Full/Half Step 4μm/2μm
Resolution Micro...
Vacuum-compatible positioning stage - max. 2.5 mm/s, 196 N | MVXA10A-R1
Table Size 100mm×100mm
Guide Mechanism Cross-Roller Guide
Motion Range ±12.5mm
Lead Mechanism Ground Screw, Lead 0.5mm
Resolution Full/Half Step 1μm/0.5μm
Resolution Micro...
Guide Mechanism Cross-Roller Guide
Motion Range ±12.5mm
Lead Mechanism Ground Screw, Lead 0.5mm
Resolution Full/Half Step 1μm/0.5μm
Resolution Micro...
Vacuum-compatible positioning stage - max. 2.5 mm/s, 196 N | MVXA10A-R1
Table Size 100mm×100mm
Guide Mechanism Cross-Roller Guide
Motion Range ±12.5mm
Lead Mechanism Ground Screw, Lead 0.5mm
Resolution Full/Half Step 1μm/0.5μm
Resolution Micro...
Guide Mechanism Cross-Roller Guide
Motion Range ±12.5mm
Lead Mechanism Ground Screw, Lead 0.5mm
Resolution Full/Half Step 1μm/0.5μm
Resolution Micro...
Vacuum-compatible positioning stage - max. 5 mm/s, 294 N | MVXA16A-R1
Table Size 160mm×124mm
Guide Mechanism Cross-Roller Guide
Motion Range ±25mm
Lead Mechanism Ground Screw, Lead 1.0mm
Resolution Full/Half Step 2μm/1μm
Resolution Micro...
Guide Mechanism Cross-Roller Guide
Motion Range ±25mm
Lead Mechanism Ground Screw, Lead 1.0mm
Resolution Full/Half Step 2μm/1μm
Resolution Micro...
Vacuum-compatible positioning stage - max. 5 mm/s, 294 N | MVXA16A-R1
Table Size 160mm×124mm
Guide Mechanism Cross-Roller Guide
Motion Range ±25mm
Lead Mechanism Ground Screw, Lead 1.0mm
Resolution Full/Half Step 2μm/1μm
Resolution Micro...
Guide Mechanism Cross-Roller Guide
Motion Range ±25mm
Lead Mechanism Ground Screw, Lead 1.0mm
Resolution Full/Half Step 2μm/1μm
Resolution Micro...