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• Vacuum-compatible positioning stage - max. 5 mm/s, 294 N | MVXA16A-R1

Vacuum-compatible positioning stage - max. 5 mm/s, 294 N | MVXA16A-R1

Table Size 160mm×124mm
Guide Mechanism Cross-Roller Guide
Motion Range ±25mm
Lead Mechanism Ground Screw, Lead 1.0mm
Resolution　Full/Half Step 2μm/1μm
Resolution　Micro...

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