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Plasma surface preparation machines
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Surface treatment machine plasma / laboratory - 2.6 L | Zepto
2,6 litres laboratory low cost plasma system ZEPTO with semi-automatic control is mainly...
Surface treatment machine plasma / laboratory - 2.6 L | Zepto
2,6 litres laboratory low cost plasma system ZEPTO with semi-automatic control is mainly used for:
-small scale production
-analysis (SEM, TEM)
-medical technology
-sterilisation
-research and development
-archaeology
-textile treatment
-semiconductor technology
-plastic technology
-small scale production
-analysis (SEM, TEM)
-medical technology
-sterilisation
-research and development
-archaeology
-textile treatment
-semiconductor technology
-plastic technology
Surface treatment machine plasma / laboratory - 10.5 L | Atto
10,5 litres laboratory low cost plasma system ATTO with semi-automatic control is mainly...
Surface treatment machine plasma / laboratory - 10.5 L | Atto
10,5 litres laboratory low cost plasma system ATTO with semi-automatic control is mainly used for:
-small scale production
-analysis (SEM, TEM)
-medical technology
-sterilisation
-research and development
-archaeology
-textile treatment
-semiconductor technology
-plastic technology
-small scale production
-analysis (SEM, TEM)
-medical technology
-sterilisation
-research and development
-archaeology
-textile treatment
-semiconductor technology
-plastic technology
Surface treatment machine plasma / laboratory - 2 L | Femto
The FEMTO plasma cleaner are available in many different configurations. The following is an overview of the most common...
Surface treatment machine plasma / laboratory - 2 L | Femto
The FEMTO plasma cleaner are available in many different configurations. The following is an overview of the most common plasma cleaner.
Basic configuration
- The outer body varies depending on the components / options
- Chamber volume: depending on the version 1,9 - 6 liters
- Power supply: 230 V AC for table top systems or
400 V AC / 3 phases for stand alone systems
Gas supply
- Needle valve
- Mass-Flow-Controller (MFCs)
Basic configuration
- The outer body varies depending on the components / options
- Chamber volume: depending on the version 1,9 - 6 liters
- Power supply: 230 V AC for table top systems or
400 V AC / 3 phases for stand alone systems
Gas supply
- Needle valve
- Mass-Flow-Controller (MFCs)
Surface treatment machine plasma / semi / laboratory / automatic - 4 - 15 L | Pico
The PICO plasma cleaner are available in many different configurations. The following is an overview...
Surface treatment machine plasma / semi / laboratory / automatic - 4 - 15 L | Pico
The PICO plasma cleaner are available in many different configurations. The following is an overview of the most common plasma cleaner.
Basic configuration
- The outer body varies depending on the components / options
- Chamber volume: depending on the version 4 - 15 liters
- Power supply: 230 V AC for table top systems or
400 V AC / 3 phases forstand alone systems
Basic configuration
- The outer body varies depending on the components / options
- Chamber volume: depending on the version 4 - 15 liters
- Power supply: 230 V AC for table top systems or
400 V AC / 3 phases forstand alone systems
Surface treatment machine plasma - 18 - 36 L | Nano
The NANO plasma cleaner are available in many different configurations. The following is an overview of the most common plasma cleaner.
Articulated robot / clean-room - SX series
SC :
Flexible transfer with its 6 axes structure.
Picking up vertically, rotation, and any other transfer is
possible
Powerful pay load with Large envelope.
Enough arm length and envelope to transfer the 10th
glass substrate Max. reach 3.6m, Up/Down envelope
4.8m
Controller
AX20
ST133CF/166CF/210CF-01 :
Heavy loads
Maximum...
Flexible transfer with its 6 axes structure.
Picking up vertically, rotation, and any other transfer is
possible
Powerful pay load with Large envelope.
Enough arm length and envelope to transfer the 10th
glass substrate Max. reach 3.6m, Up/Down envelope
4.8m
Controller
AX20
ST133CF/166CF/210CF-01 :
Heavy loads
Maximum...
Articulated robot / clean-room - SX series
SC :
Flexible transfer with its 6 axes structure.
Picking up vertically, rotation, and any other transfer is
possible
Powerful pay load with Large envelope.
Enough arm length and envelope to transfer the 10th
glass substrate Max. reach 3.6m, Up/Down envelope
4.8m
Controller
AX20
ST133CF/166CF/210CF-01 :
Heavy loads
Maximum pay load up to 210 kg, perfect for handling large
panels.
Improved maneuverability
Faster with improved rigidity reduces cycle times and
minimizes flexure and vibration.
Clean room compatible
ISO class 6 clean room compatibility for operating in clean
room environments.
Easy operation
Teaching pendent with large LCD has color graphics that
simplify and clarify operations to greatly reduce Robot
Programming times.
Controller
AX20
SJ80C-18D/24D, SJ120C-28D/28S :
Largesized glass substrate transfer robot
Perfect for horizontal transfer of 7th generation
(SJ80C) through 9th generation (SJ120C) and other
various-sized glass substrates.
Fastest motion in its class
Rotation speed: Maximum 180* /sec
Up and down speed: Maximum 1,050 mm/sec
Unique linkage structure applied to up and down
axis
High-rigidity structure for minimizing flexure and
vibration
Be It-less structure ensures high reliability and safety
Moving cables are completely enclosed in the arm
The enclosed design prevents particle generation and
looks good too
Controller
AX30
Flexible transfer with its 6 axes structure.
Picking up vertically, rotation, and any other transfer is
possible
Powerful pay load with Large envelope.
Enough arm length and envelope to transfer the 10th
glass substrate Max. reach 3.6m, Up/Down envelope
4.8m
Controller
AX20
ST133CF/166CF/210CF-01 :
Heavy loads
Maximum pay load up to 210 kg, perfect for handling large
panels.
Improved maneuverability
Faster with improved rigidity reduces cycle times and
minimizes flexure and vibration.
Clean room compatible
ISO class 6 clean room compatibility for operating in clean
room environments.
Easy operation
Teaching pendent with large LCD has color graphics that
simplify and clarify operations to greatly reduce Robot
Programming times.
Controller
AX20
SJ80C-18D/24D, SJ120C-28D/28S :
Largesized glass substrate transfer robot
Perfect for horizontal transfer of 7th generation
(SJ80C) through 9th generation (SJ120C) and other
various-sized glass substrates.
Fastest motion in its class
Rotation speed: Maximum 180* /sec
Up and down speed: Maximum 1,050 mm/sec
Unique linkage structure applied to up and down
axis
High-rigidity structure for minimizing flexure and
vibration
Be It-less structure ensures high reliability and safety
Moving cables are completely enclosed in the arm
The enclosed design prevents particle generation and
looks good too
Controller
AX30
Surface treatment machine plasma - AP-600, AP-300
The AP-300 and AP-600 plasma systems from Nordson MARCH are designed to deliver exceptionally uniform plasma cleaning and treatment with unmatched ease of operation, reliability and low cost
Both models are completely self-contained, requiring minimal bench space. The system chassis houses the plasma chamber, control electronics, 13.56 MHz RF generator,...
Both models are completely self-contained, requiring minimal bench space. The system chassis houses the plasma chamber, control electronics, 13.56 MHz RF generator,...
Surface treatment machine plasma - AP-600, AP-300
The AP-300 and AP-600 plasma systems from Nordson MARCH are designed to deliver exceptionally uniform plasma cleaning and treatment with unmatched ease of operation, reliability and low cost
Both models are completely self-contained, requiring minimal bench space. The system chassis houses the plasma chamber, control electronics, 13.56 MHz RF generator, and the automatic matching network (only the vacuum pump is external to the system). Maintenance access is provided through an interlocked door or removable panels.
The plasma chamber is constructed of high-quality aluminum with aluminum fixtures for superior durability. The plasma chamber supports up to 7 removable and adjustable powered or grounded shelves to accommodate a wide range of piece-parts, components, and part carriers including magazines, trays, and boats.
The AP-300 and AP-600 plasma system are suitable for a wide variety of plasma cleaning, surface activation and adhesion improvement applications. These capabilities are used for semiconductor manufacturing, microelectronic packaging and assembly, and by manufacturers of medical and life science devices.
The systems can accommodate a wide range of process gases including argon, oxygen, hydrogen, helium, and fluorinated gases. Both models come standard with two (2) electronic mass flow controllers for optimal gas control, with another two (2) available optionally (4 total max.).
Both models are completely self-contained, requiring minimal bench space. The system chassis houses the plasma chamber, control electronics, 13.56 MHz RF generator, and the automatic matching network (only the vacuum pump is external to the system). Maintenance access is provided through an interlocked door or removable panels.
The plasma chamber is constructed of high-quality aluminum with aluminum fixtures for superior durability. The plasma chamber supports up to 7 removable and adjustable powered or grounded shelves to accommodate a wide range of piece-parts, components, and part carriers including magazines, trays, and boats.
The AP-300 and AP-600 plasma system are suitable for a wide variety of plasma cleaning, surface activation and adhesion improvement applications. These capabilities are used for semiconductor manufacturing, microelectronic packaging and assembly, and by manufacturers of medical and life science devices.
The systems can accommodate a wide range of process gases including argon, oxygen, hydrogen, helium, and fluorinated gases. Both models come standard with two (2) electronic mass flow controllers for optimal gas control, with another two (2) available optionally (4 total max.).
Surface treatment machine plasma - AP-1000
The Nordson MARCH AP-1000 Plasma System is designed to meet the rigorous demands of 24-hour operation in high performance manufacturing environments. The system delivers uniform plasma treatment with unmatched reliability, safety and ease of operation.
Uniform plasma treatment for the most demanding production environments
The AP-1000 platform is completely self-contained, requiring...
Uniform plasma treatment for the most demanding production environments
The AP-1000 platform is completely self-contained, requiring...
Surface treatment machine plasma - AP-1000
The Nordson MARCH AP-1000 Plasma System is designed to meet the rigorous demands of 24-hour operation in high performance manufacturing environments. The system delivers uniform plasma treatment with unmatched reliability, safety and ease of operation.
Uniform plasma treatment for the most demanding production environments
The AP-1000 platform is completely self-contained, requiring minimal floor space. The pump, chamber, control electronics, and 13.56 MHz RF generator are housed in a single enclosure. Full front access allows for convenient access to all interior components. The pump is positioned on rollers for easy removal.
The plasma chamber is constructed of 11-gauge stainless steel with aluminum fixtures for superior durability. The chamber has multiple removable and adjustable shelves to accommodate a range of part carriers, including magazines, trays, wafer and Auer boats.
Enhanced productivity for high-volume capacity requirements
The AP-1000 Plasma System with optional HTP (high throughput) shelves combines the reliability and process quality of the AP-1000 system with the proven benefits of Nordson MARCH’s unique shelf design. The AP-1000 HTP optimizes use of the reactive ions found in RF plasma, increasing treatment uniformity while decreasing process time.
The AP-1000 HTP system allows selection from a range of process gases such as Argon, Hydrogen and Helium. It comes standard equipped with four mass flow controllers for optimal gas control. Slotted magazines are placed vertically inside the chamber.
Uniform plasma treatment for the most demanding production environments
The AP-1000 platform is completely self-contained, requiring minimal floor space. The pump, chamber, control electronics, and 13.56 MHz RF generator are housed in a single enclosure. Full front access allows for convenient access to all interior components. The pump is positioned on rollers for easy removal.
The plasma chamber is constructed of 11-gauge stainless steel with aluminum fixtures for superior durability. The chamber has multiple removable and adjustable shelves to accommodate a range of part carriers, including magazines, trays, wafer and Auer boats.
Enhanced productivity for high-volume capacity requirements
The AP-1000 Plasma System with optional HTP (high throughput) shelves combines the reliability and process quality of the AP-1000 system with the proven benefits of Nordson MARCH’s unique shelf design. The AP-1000 HTP optimizes use of the reactive ions found in RF plasma, increasing treatment uniformity while decreasing process time.
The AP-1000 HTP system allows selection from a range of process gases such as Argon, Hydrogen and Helium. It comes standard equipped with four mass flow controllers for optimal gas control. Slotted magazines are placed vertically inside the chamber.
Surface treatment machine plasma - AP-1500
The Nordson MARCH AP-1500 Plasma System is designed to provide best-in class plasma treatment with its large chamber for batch-type plasma processing. Daily operating expenses, such as process gases and power consumption, are minimized through unique design concepts.
Effective plasma treatment with an extra large chamber for batch processing
The AP-1500...
Effective plasma treatment with an extra large chamber for batch processing
The AP-1500...
Surface treatment machine plasma - AP-1500
The Nordson MARCH AP-1500 Plasma System is designed to provide best-in class plasma treatment with its large chamber for batch-type plasma processing. Daily operating expenses, such as process gases and power consumption, are minimized through unique design concepts.
Effective plasma treatment with an extra large chamber for batch processing
The AP-1500 is a cost- and space-efficient plasma system for treating all types of parts and components. It is completely self-contained, and requires minimal floor space. The pump, chamber, control electronics, and 13.56 MHz RF generator are all contained within its enclosure. Front and rear maintenance doors allow for convenient access to all interior components, and the pump is positioned on rollers for easy removal.
Plasma cleaning and surface preparation
The AP-1500 Plasma System is designed to deliver superior performance for plasma cleaning and surface preparation applications. The horizontal electrodes (shelves) allow for large batch loads.
The AP-1500 Plasma System is designed to maximize plasma efficiency through the use of advanced power matching and control system algorithms. The intuitive touch screen control panel monitors and controls the plasma process in real-time. The control system can be password-protected at multiple levels to prevent unauthorized recipe modification. This ensures consistent performance of the system from the first batch to the last.
Effective plasma treatment with an extra large chamber for batch processing
The AP-1500 is a cost- and space-efficient plasma system for treating all types of parts and components. It is completely self-contained, and requires minimal floor space. The pump, chamber, control electronics, and 13.56 MHz RF generator are all contained within its enclosure. Front and rear maintenance doors allow for convenient access to all interior components, and the pump is positioned on rollers for easy removal.
Plasma cleaning and surface preparation
The AP-1500 Plasma System is designed to deliver superior performance for plasma cleaning and surface preparation applications. The horizontal electrodes (shelves) allow for large batch loads.
The AP-1500 Plasma System is designed to maximize plasma efficiency through the use of advanced power matching and control system algorithms. The intuitive touch screen control panel monitors and controls the plasma process in real-time. The control system can be password-protected at multiple levels to prevent unauthorized recipe modification. This ensures consistent performance of the system from the first batch to the last.
Surface treatment machine plasma - FasTRAK™
The FasTRAK™ Plasma System is a fully-automated, high-throughput, plasma treatment system for lead-frame strips, laminate substrates, and other strip-type microelectronic components.
Measuring 1.65 meters wide by 1.5 meters deep the FasTRAK Plasma System has a >35% smaller system footprint than previous strip processing models. The capability to...
Measuring 1.65 meters wide by 1.5 meters deep the FasTRAK Plasma System has a >35% smaller system footprint than previous strip processing models. The capability to...
Surface treatment machine plasma - FasTRAK™
The FasTRAK™ Plasma System is a fully-automated, high-throughput, plasma treatment system for lead-frame strips, laminate substrates, and other strip-type microelectronic components.
Measuring 1.65 meters wide by 1.5 meters deep the FasTRAK Plasma System has a >35% smaller system footprint than previous strip processing models. The capability to reuse magazines further reduces the effective footprint as the empty magazines do not need to be staged at the system.
Using state-of-the-art robotic movement that virtually eliminates operator handling of the strips or magazines, the FasTRAK Plasma System accommodates the full-known range of magazines and strip width, length and thickness dimensions.
The FasTRAK System makes it easy to change over to accommodate a new magazine or strip size - recipes are software driven and the system requires minimal hardware interaction or tooling.
The field-proven robotics were specifically designed to lower the handling risk to sensitive substrate materials by using minimal movement, pushing, pulling and low G-forces.
The FasTRAK System features an innovative new material tracking software application and internal camera to count the number of strips and track their progress throughout the entire treatment process, providing 100% treatment validation. Up to 10 strips can be accommodated per batch with an industry leading units per hour (UPH) treatment rate.
Measuring 1.65 meters wide by 1.5 meters deep the FasTRAK Plasma System has a >35% smaller system footprint than previous strip processing models. The capability to reuse magazines further reduces the effective footprint as the empty magazines do not need to be staged at the system.
Using state-of-the-art robotic movement that virtually eliminates operator handling of the strips or magazines, the FasTRAK Plasma System accommodates the full-known range of magazines and strip width, length and thickness dimensions.
The FasTRAK System makes it easy to change over to accommodate a new magazine or strip size - recipes are software driven and the system requires minimal hardware interaction or tooling.
The field-proven robotics were specifically designed to lower the handling risk to sensitive substrate materials by using minimal movement, pushing, pulling and low G-forces.
The FasTRAK System features an innovative new material tracking software application and internal camera to count the number of strips and track their progress throughout the entire treatment process, providing 100% treatment validation. Up to 10 strips can be accommodated per batch with an industry leading units per hour (UPH) treatment rate.
Surface treatment machine plasma - FlexTRAK-CD
The FlexTRAK-CD plasma system is designed for high throughput processing of lead frame strips, laminated substrates, and other strip-type electronic components, up to 10 strips per plasma cycle
Superior Plasma Processing, Small Footprint, High-Throughput
The patented plasma chamber design provides high uniformity and process repeatability....
Superior Plasma Processing, Small Footprint, High-Throughput
The patented plasma chamber design provides high uniformity and process repeatability....
Surface treatment machine plasma - FlexTRAK-CD
The FlexTRAK-CD plasma system is designed for high throughput processing of lead frame strips, laminated substrates, and other strip-type electronic components, up to 10 strips per plasma cycle
Superior Plasma Processing, Small Footprint, High-Throughput
The patented plasma chamber design provides high uniformity and process repeatability. It ensures all areas of the substrate are treated uniformly, while tight control over process parameters provides highly repeatable results.
The system accommodates a wide range of strip sizes, yielding unmatched production flexibility. Its small chamber volume and proprietary process control system provide short cycle times, with high machine autonomy.
Applications
Plasma for pre-die attach, pre-wire bond, pre-mold encapsulation and pre-underfill such as:
Contamination Removal & Surface Cleaning
Fluorine & other halogens
Metals & metal oxides
Organic compounds
Etching and Surface Roughening
Improve die adhesion & wire bonding
Improve mold adhesion & reduce delamination
Surface Activation
Improve die adhesive flow, eliminate voids and enhance adhesion
Improve mold material flow, eliminate voids and reduce wire sweep
Improve underfill flow, eliminate voids, enhance adhesion, and increase wicking speed
Superior Plasma Processing, Small Footprint, High-Throughput
The patented plasma chamber design provides high uniformity and process repeatability. It ensures all areas of the substrate are treated uniformly, while tight control over process parameters provides highly repeatable results.
The system accommodates a wide range of strip sizes, yielding unmatched production flexibility. Its small chamber volume and proprietary process control system provide short cycle times, with high machine autonomy.
Applications
Plasma for pre-die attach, pre-wire bond, pre-mold encapsulation and pre-underfill such as:
Contamination Removal & Surface Cleaning
Fluorine & other halogens
Metals & metal oxides
Organic compounds
Etching and Surface Roughening
Improve die adhesion & wire bonding
Improve mold adhesion & reduce delamination
Surface Activation
Improve die adhesive flow, eliminate voids and enhance adhesion
Improve mold material flow, eliminate voids and reduce wire sweep
Improve underfill flow, eliminate voids, enhance adhesion, and increase wicking speed