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Electron spectrometers: AES, XPS, EELS...
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X-ray photoelectron spectrometer - ESCALAB 250Xi
The Thermo Scientific ESCALAB 250Xi is an XPS spectrometer coupling featuring high sensitivity with high resolution quantitative imaging and multi-technique capability. XPS is a rich blend of several characteristics...
X-ray photoelectron spectrometer - ESCALAB 250Xi
The Thermo Scientific ESCALAB 250Xi is an XPS spectrometer coupling featuring high sensitivity with high resolution quantitative imaging and multi-technique capability. XPS is a rich blend of several characteristics proving it as an essential tool
for application in development of advanced materials in a wider section of technology such as from bio-materials to semiconductor materials.
ESCALAB 250Xi is specially designed in line with the rising demands for increased analytical performance and flexibility. The additional and optional surface analytical techniques may be used on ESCALAB 250Xi in order to augment the information provided by XPS. The device includes advanced data system for acquisition and data processing which ensures maximum extraction of information from the data
for application in development of advanced materials in a wider section of technology such as from bio-materials to semiconductor materials.
ESCALAB 250Xi is specially designed in line with the rising demands for increased analytical performance and flexibility. The additional and optional surface analytical techniques may be used on ESCALAB 250Xi in order to augment the information provided by XPS. The device includes advanced data system for acquisition and data processing which ensures maximum extraction of information from the data
X-ray photoelectron spectrometer - Theta Probe
Thermo Scientific Theta Probe is a small spot XPS instrument which has the unique ability to collect angle resolved spectra without the need to tilt the sample. It provides the capability to characterize ultra-thin...
X-ray photoelectron spectrometer - Theta Probe
Thermo Scientific Theta Probe is a small spot XPS instrument which has the unique ability to collect angle resolved spectra without the need to tilt the sample. It provides the capability to characterize ultra-thin layers non-destructively.
New and emerging technologies rely largely on the engineering of the near-surface region of a solid surface. These technologies include bio-medical devices, surface modified polymers and materials within advanced semiconductor devices. It is important that the composition of the first few nanometers is done perfectly for such materials.
Theta Probe is a unique XPS spectrometer that makes use of parallel angle resolved XPS (PARXPS). It has the advantage of the advanced software which deals with the ARXPS data and produce accurate and precise answers.
New and emerging technologies rely largely on the engineering of the near-surface region of a solid surface. These technologies include bio-medical devices, surface modified polymers and materials within advanced semiconductor devices. It is important that the composition of the first few nanometers is done perfectly for such materials.
Theta Probe is a unique XPS spectrometer that makes use of parallel angle resolved XPS (PARXPS). It has the advantage of the advanced software which deals with the ARXPS data and produce accurate and precise answers.
X-ray photoelectron spectrometer - Theta 300
Thermo Scientific* Theta 300 is a wafer-management instrument that employs a grouping of angle resolved X-ray photoelectron spectroscopy and X-ray photoelectron spectroscopy to distinguish planes and ultra-thin films by means of high accuracy....
X-ray photoelectron spectrometer - Theta 300
Thermo Scientific* Theta 300 is a wafer-management instrument that employs a grouping of angle resolved X-ray photoelectron spectroscopy and X-ray photoelectron spectroscopy to distinguish planes and ultra-thin films by means of high accuracy. Several of the novel materials that are currently emerging in semiconductor appliances are chemically multifaceted and are there as ultra-thin films. For this kind of fabric, it is necessary that the concerto of the film is recognized with poise together with the method in which the concerto differs near to surfaces and crossing points. Theta 300 offers this fact from wafers of maximum of 300mm diameter by using analogous slant resolved X-ray photoelectron spectroscopy. The Avantage information system, which is essential to Theta 300, offers all of the sophisticated software to cope with the analogous slant resolved X-ray photoelectron spectroscopy information and generate precise and accurate dimensions.
Electron probe microanalyzer (EPMA) - SXFiveFE
Field Emission Electron Probe Micro Analyzer for Quantitative Analysis and X-Ray Mapping at the Highest Possible Spatial Resolution
The SXFiveFE is CAMECAs fifth generation electron probe microanalyzer. It brings together all of the best features of CAMECAs previous EPMA models and incorporates a number of outstanding...
The SXFiveFE is CAMECAs fifth generation electron probe microanalyzer. It brings together all of the best features of CAMECAs previous EPMA models and incorporates a number of outstanding...
Electron probe microanalyzer (EPMA) - SXFiveFE
Field Emission Electron Probe Micro Analyzer for Quantitative Analysis and X-Ray Mapping at the Highest Possible Spatial Resolution
The SXFiveFE is CAMECAs fifth generation electron probe microanalyzer. It brings together all of the best features of CAMECAs previous EPMA models and incorporates a number of outstanding features, including the unique combination of a field emission electron column with CAMECA's industry-leading high-sensitivity and resolution spectrometers.
The SXFiveFE performs high accuracy quantitative chemical microanalysis at highest possible spatial resolution in mineralogy, geochronology, and material sciences.
Optimized Field Emission electron column
The SXFiveFE is equipped with a Field Emission (FE) electron source (Schottky emitter). The electron column has been optimized to achieve small beam diameters with high beam currents even at low accelerating voltages thus enabling X-ray mapping and quantitative analysis at extremely high spatial resolution. The beam intensity is accurately measured with an annular Faraday cup and is continuously regulated, achieving a stability of 0.5% per hour, thus enabling reliable quantitative analyses. The high voltage system operates at up to 30 kV for elements with high atomic number.
The SXFiveFE is CAMECAs fifth generation electron probe microanalyzer. It brings together all of the best features of CAMECAs previous EPMA models and incorporates a number of outstanding features, including the unique combination of a field emission electron column with CAMECA's industry-leading high-sensitivity and resolution spectrometers.
The SXFiveFE performs high accuracy quantitative chemical microanalysis at highest possible spatial resolution in mineralogy, geochronology, and material sciences.
Optimized Field Emission electron column
The SXFiveFE is equipped with a Field Emission (FE) electron source (Schottky emitter). The electron column has been optimized to achieve small beam diameters with high beam currents even at low accelerating voltages thus enabling X-ray mapping and quantitative analysis at extremely high spatial resolution. The beam intensity is accurately measured with an annular Faraday cup and is continuously regulated, achieving a stability of 0.5% per hour, thus enabling reliable quantitative analyses. The high voltage system operates at up to 30 kV for elements with high atomic number.
Electron probe microanalyzer (EPMA) - SXFive
Electron Probe Micro Analyzer for Materials & Geosciences
Combining advanced electron optics, state-of-the-art spectrometer design and dedicated software, the CAMECA SXFive performs high accuracy qualitative and quantitative chemical microanalysis in...
Combining advanced electron optics, state-of-the-art spectrometer design and dedicated software, the CAMECA SXFive performs high accuracy qualitative and quantitative chemical microanalysis in...
Electron probe microanalyzer (EPMA) - SXFive
Electron Probe Micro Analyzer for Materials & Geosciences
Combining advanced electron optics, state-of-the-art spectrometer design and dedicated software, the CAMECA SXFive performs high accuracy qualitative and quantitative chemical microanalysis in...
Combining advanced electron optics, state-of-the-art spectrometer design and dedicated software, the CAMECA SXFive performs high accuracy qualitative and quantitative chemical microanalysis in...
Electron probe microanalyzer (EPMA) - Shielded SX
Shielded Electron Probe MicroAnalyzer for Radioactive Samples
The Shielded SX has been specifically developed to handle and analyze radioactive samples (eg nuclear fuels) emitting gamma radiations up to 3 Curies at 0.75MeV. Based on the SXFive and SXFiveFE architecture, the Shieldede SX is further equipped with shielded WDS spectrometers and a shielded sample stage in...
The Shielded SX has been specifically developed to handle and analyze radioactive samples (eg nuclear fuels) emitting gamma radiations up to 3 Curies at 0.75MeV. Based on the SXFive and SXFiveFE architecture, the Shieldede SX is further equipped with shielded WDS spectrometers and a shielded sample stage in...
Electron probe microanalyzer (EPMA) - Shielded SX
Shielded Electron Probe MicroAnalyzer for Radioactive Samples
The Shielded SX has been specifically developed to handle and analyze radioactive samples (eg nuclear fuels) emitting gamma radiations up to 3 Curies at 0.75MeV. Based on the SXFive and SXFiveFE architecture, the Shieldede SX is further equipped with shielded WDS spectrometers and a shielded sample stage in order to ensure safe sample manipulation and to preserve analytical performance.
Fully customized environment and analytical equipment
The instrument (column, spectrometers and sample stage) are installed in a "hot" cell (lead or concrete shielded room).
The instrument is fully remote-controlled (stage, column, diaphragms...) with electronics and computer deported outside the hot cell environment.
Remote-manipulators and/or ball manipulators are used to insert and mount the radioactive samples. In the ITU Karlsruhe-Germany configuration, for example, the analysis chamber is vented and the stage is moved to a position directly accessible with ball-manipulators at each sample exchange. In the LECA/STAR CEA Cadarache-France design, samples are introduced via an airlock system located in a glove box for alpha confinement.
All WDS analyzers and detectors are shielded to prevent the background caused by the gamma radiations.
Cs X Ray map from irradiated fuels
The stage is made of Denal material.
The Secondary Elecron detector has a special orientation to avoid gamma ray perturbation.
The Shielded SX has been specifically developed to handle and analyze radioactive samples (eg nuclear fuels) emitting gamma radiations up to 3 Curies at 0.75MeV. Based on the SXFive and SXFiveFE architecture, the Shieldede SX is further equipped with shielded WDS spectrometers and a shielded sample stage in order to ensure safe sample manipulation and to preserve analytical performance.
Fully customized environment and analytical equipment
The instrument (column, spectrometers and sample stage) are installed in a "hot" cell (lead or concrete shielded room).
The instrument is fully remote-controlled (stage, column, diaphragms...) with electronics and computer deported outside the hot cell environment.
Remote-manipulators and/or ball manipulators are used to insert and mount the radioactive samples. In the ITU Karlsruhe-Germany configuration, for example, the analysis chamber is vented and the stage is moved to a position directly accessible with ball-manipulators at each sample exchange. In the LECA/STAR CEA Cadarache-France design, samples are introduced via an airlock system located in a glove box for alpha confinement.
All WDS analyzers and detectors are shielded to prevent the background caused by the gamma radiations.
Cs X Ray map from irradiated fuels
The stage is made of Denal material.
The Secondary Elecron detector has a special orientation to avoid gamma ray perturbation.
Auger spectrometer - NanoSAM Lab
UHV Gemini Electron Column:
highest spatial resolution
smallest e-beam spot size
unique low-energy performance
efficient SEM with in-lens SED
NanoSAM Electron Analyser:
variable energy resolution
excellent...
highest spatial resolution
smallest e-beam spot size
unique low-energy performance
efficient SEM with in-lens SED
NanoSAM Electron Analyser:
variable energy resolution
excellent...
Auger spectrometer - NanoSAM Lab
UHV Gemini Electron Column:
highest spatial resolution
smallest e-beam spot size
unique low-energy performance
efficient SEM with in-lens SED
NanoSAM Electron Analyser:
variable energy resolution
excellent sensitivity, multichannel detection
Sample Handling:
flexible sample size
variable sample temperature (50-500K)
sample tilt 60
The NanoSAM Lab is the ultimate tool for the analysis of small structures. Driven by the unique performance of the UHV Gemini electron column, it guarantees unrivalled resolution below 5 nm in Scanning Auger Microscopy (SAM) and better than 3 nm in SEM.
In contrast to other Auger tools, the extremely good resolution is not only available at standard 20 keV beam energy, but even at 5 keV the SAM resolution remains below 10 nm. This allows operation in a parameter range where the Auger cross sections are high, and well documented for quantitative analysis.
highest spatial resolution
smallest e-beam spot size
unique low-energy performance
efficient SEM with in-lens SED
NanoSAM Electron Analyser:
variable energy resolution
excellent sensitivity, multichannel detection
Sample Handling:
flexible sample size
variable sample temperature (50-500K)
sample tilt 60
The NanoSAM Lab is the ultimate tool for the analysis of small structures. Driven by the unique performance of the UHV Gemini electron column, it guarantees unrivalled resolution below 5 nm in Scanning Auger Microscopy (SAM) and better than 3 nm in SEM.
In contrast to other Auger tools, the extremely good resolution is not only available at standard 20 keV beam energy, but even at 5 keV the SAM resolution remains below 10 nm. This allows operation in a parameter range where the Auger cross sections are high, and well documented for quantitative analysis.
X-ray photoelectron spectrometer - NanoESCA
Ultimate Imaging XPS Resolution: 500 nm / 100 nm (Lab / Synchroton)
Easy sample navigation by PEEM technology
Small spot spectroscopy
Aberration Corrected Energy Filter
High Power Monochromatic X-Ray Source
ARUPS with ultimate angle acceptance
Created in co-operation with FOCUS GmbH
The...
Easy sample navigation by PEEM technology
Small spot spectroscopy
Aberration Corrected Energy Filter
High Power Monochromatic X-Ray Source
ARUPS with ultimate angle acceptance
Created in co-operation with FOCUS GmbH
The...
X-ray photoelectron spectrometer - NanoESCA
Ultimate Imaging XPS Resolution: 500 nm / 100 nm (Lab / Synchroton)
Easy sample navigation by PEEM technology
Small spot spectroscopy
Aberration Corrected Energy Filter
High Power Monochromatic X-Ray Source
ARUPS with ultimate angle acceptance
Created in co-operation with FOCUS GmbH
The NanoESCA offers chemical state mapping with unsurpassed XPS lateral resolution (<500 nm achieved under laboratory conditions). The instrument allows analyzing smallest sample structures giving chemical state information beyond the limits of other high lateral resolution techniques such as scanning Auger and TOF SIMS.
Real time sample navigation is ensured by PEEM technique which operates in the secondary electron regime. The PEEM mode allows finding small features easily on a large sample area and provides high resolution (< 50 nm resolution). In addition the PEEM mode provides quantitative information on the very local work function and local sample charging.
The spectroscopy capabilities of the NanoESCA can be completed by the ARUPS option which allows analyzing the k-space from m-areas e.g. small grains in a polycrystalline surface with ultimate angular acceptance.
For its revolutionary design the NanoESCA received the 2007 R&D 100 award.
Easy sample navigation by PEEM technology
Small spot spectroscopy
Aberration Corrected Energy Filter
High Power Monochromatic X-Ray Source
ARUPS with ultimate angle acceptance
Created in co-operation with FOCUS GmbH
The NanoESCA offers chemical state mapping with unsurpassed XPS lateral resolution (<500 nm achieved under laboratory conditions). The instrument allows analyzing smallest sample structures giving chemical state information beyond the limits of other high lateral resolution techniques such as scanning Auger and TOF SIMS.
Real time sample navigation is ensured by PEEM technique which operates in the secondary electron regime. The PEEM mode allows finding small features easily on a large sample area and provides high resolution (< 50 nm resolution). In addition the PEEM mode provides quantitative information on the very local work function and local sample charging.
The spectroscopy capabilities of the NanoESCA can be completed by the ARUPS option which allows analyzing the k-space from m-areas e.g. small grains in a polycrystalline surface with ultimate angular acceptance.
For its revolutionary design the NanoESCA received the 2007 R&D 100 award.
Analyzer / electron spectrum - Argus CU
Excellent Sensitivity
Compression Lens
True Counting Multi-Anode Detector
Linear Response up to the Highest Count Rates
Excellent...
Compression Lens
True Counting Multi-Anode Detector
Linear Response up to the Highest Count Rates
Excellent...
Analyzer / electron spectrum - Argus CU
Excellent Sensitivity
Compression Lens
True Counting Multi-Anode Detector
Linear Response up to the Highest Count Rates
Excellent Dynamic Range
Snapshot and Dynamic XPS
Chemical State Mapping
The new Argus lens design Argus CU incorporates a thoroughly optimised compression unit which delivers a line focus at the entrance of the hemisphere. The width of the line focus is - to the first order- independent of slit shape and analysed sample area. This lens design is therefore highly advantageous over conventional analyser lenses.
Compression Lens
True Counting Multi-Anode Detector
Linear Response up to the Highest Count Rates
Excellent Dynamic Range
Snapshot and Dynamic XPS
Chemical State Mapping
The new Argus lens design Argus CU incorporates a thoroughly optimised compression unit which delivers a line focus at the entrance of the hemisphere. The width of the line focus is - to the first order- independent of slit shape and analysed sample area. This lens design is therefore highly advantageous over conventional analyser lenses.
X-ray photoelectron spectrometer - ESCA+
High sensitivity and Snapshot XPS (Argus technology)
Micro-area spectroscopy and quantitative chemical state imaging
Robust multi-technique platform
High Speed Thin Film Depth Profiling
'Dual Beam' Charge Neutralisation
Specialist variants with ancillary preparation and analysis techniques
The ESCA+ has been...
Micro-area spectroscopy and quantitative chemical state imaging
Robust multi-technique platform
High Speed Thin Film Depth Profiling
'Dual Beam' Charge Neutralisation
Specialist variants with ancillary preparation and analysis techniques
The ESCA+ has been...
X-ray photoelectron spectrometer - ESCA+
High sensitivity and Snapshot XPS (Argus technology)
Micro-area spectroscopy and quantitative chemical state imaging
Robust multi-technique platform
High Speed Thin Film Depth Profiling
'Dual Beam' Charge Neutralisation
Specialist variants with ancillary preparation and analysis techniques
The ESCA+ has been designed to combine ease of operation and high sample throughput with excellent performance across the entire range of ESCA techniques. The instrument allows large area XPS with ultimate sensitivity as well as small spot analysis and imaging XPS.
The dual beam charge neutralization (low energy ions and electrons) ensures excellent energy resolution on insulating samples. The fine focus argon ion gun allows rapid sputter depth profiling with excellent in-depth resolution. Omicrons automation software CASCADE provides intuitive operation for all routine and research applications.
The modular system concept as used across Omicron range ensures that even less familiar ESCA requirements such as TPD (Temperature Programmable Desorption), high pressure catalysis and advanced sample preparation are seamlessly integrated into the package.
The combination of versatility, high performance and professional grade operation make ESCA+ the ideal choice for ESCA studies in any multi-user laboratory.
Micro-area spectroscopy and quantitative chemical state imaging
Robust multi-technique platform
High Speed Thin Film Depth Profiling
'Dual Beam' Charge Neutralisation
Specialist variants with ancillary preparation and analysis techniques
The ESCA+ has been designed to combine ease of operation and high sample throughput with excellent performance across the entire range of ESCA techniques. The instrument allows large area XPS with ultimate sensitivity as well as small spot analysis and imaging XPS.
The dual beam charge neutralization (low energy ions and electrons) ensures excellent energy resolution on insulating samples. The fine focus argon ion gun allows rapid sputter depth profiling with excellent in-depth resolution. Omicrons automation software CASCADE provides intuitive operation for all routine and research applications.
The modular system concept as used across Omicron range ensures that even less familiar ESCA requirements such as TPD (Temperature Programmable Desorption), high pressure catalysis and advanced sample preparation are seamlessly integrated into the package.
The combination of versatility, high performance and professional grade operation make ESCA+ the ideal choice for ESCA studies in any multi-user laboratory.
Analyzer / electron spectrum - Argus
Excellent sensitivity
Snapshot & Dynamic XPS
Imaging and small area XPS
XPD, AES, ISS and UPS
CASCADE automation system
Rapid upgrade of outdated XPS systems
Argus is a next generation hemispherical analyser with multichannel detection technology developed for uncompromised XPS and ESCA analysis. It is a multi-purpose easy-to-use electron spectrometer...
Snapshot & Dynamic XPS
Imaging and small area XPS
XPD, AES, ISS and UPS
CASCADE automation system
Rapid upgrade of outdated XPS systems
Argus is a next generation hemispherical analyser with multichannel detection technology developed for uncompromised XPS and ESCA analysis. It is a multi-purpose easy-to-use electron spectrometer...
Analyzer / electron spectrum - Argus
Excellent sensitivity
Snapshot & Dynamic XPS
Imaging and small area XPS
XPD, AES, ISS and UPS
CASCADE automation system
Rapid upgrade of outdated XPS systems
Argus is a next generation hemispherical analyser with multichannel detection technology developed for uncompromised XPS and ESCA analysis. It is a multi-purpose easy-to-use electron spectrometer with excellent transmission and outstanding sensitivity provided by state-of-the-art multi channel detection. Dedicated detection modes such as Snapshot XPS and chemical state imaging guarantee that relevant information from the sample surface is provided to the scientist fast and easily.
Rapid and reliable quantitative analysis relies on high sensitivity detectors and well characterized high-transmission electron optics in all parts of the spectrometer from the lens entrance to the detector surface. The Argus is based on proven lens design optimized by extensive electron optical simulations and careful verification in experiments.
Well defined small spot analysis is guaranteed by a dedicated and easy-to-use aperture mechanism. The combination of a double aperture mechanism and a fully characterized magnification lens ensures defined area analysis from several mm down to <60um diameter without crosstalk from the surrounding area.
While imaging XPS ensures navigation and identification of inhomogeneous samples the multi channel detector increases analysis speed and provides modes e.g. for dynamic process analysis.
Snapshot & Dynamic XPS
Imaging and small area XPS
XPD, AES, ISS and UPS
CASCADE automation system
Rapid upgrade of outdated XPS systems
Argus is a next generation hemispherical analyser with multichannel detection technology developed for uncompromised XPS and ESCA analysis. It is a multi-purpose easy-to-use electron spectrometer with excellent transmission and outstanding sensitivity provided by state-of-the-art multi channel detection. Dedicated detection modes such as Snapshot XPS and chemical state imaging guarantee that relevant information from the sample surface is provided to the scientist fast and easily.
Rapid and reliable quantitative analysis relies on high sensitivity detectors and well characterized high-transmission electron optics in all parts of the spectrometer from the lens entrance to the detector surface. The Argus is based on proven lens design optimized by extensive electron optical simulations and careful verification in experiments.
Well defined small spot analysis is guaranteed by a dedicated and easy-to-use aperture mechanism. The combination of a double aperture mechanism and a fully characterized magnification lens ensures defined area analysis from several mm down to <60um diameter without crosstalk from the surrounding area.
While imaging XPS ensures navigation and identification of inhomogeneous samples the multi channel detector increases analysis speed and provides modes e.g. for dynamic process analysis.