X-ray photoelectron spectrometer - Theta 300
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Thermo Scientific* Theta 300 is a wafer-management instrument that employs a grouping of angle resolved X-ray photoelectron spectroscopy and X-ray photoelectron spectroscopy to distinguish planes and ultra-thin films by means of high accuracy. Several of the novel materials that are currently emerging in semiconductor appliances are chemically multifaceted and are there as ultra-thin films. For this kind of fabric, it is necessary that the concerto of the film is recognized with poise together with the method in which the concerto differs near to surfaces and crossing points. Theta 300 offers this fact from wafers of maximum of 300mm diameter by using analogous slant resolved X-ray photoelectron spectroscopy. The Avantage information system, which is essential to Theta 300, offers all of the sophisticated software to cope with the analogous slant resolved X-ray photoelectron spectroscopy information and generate precise and accurate dimensions.
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