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Surface profile measuring machine for semiconductor - HRP-250
The HRP-250 is an automated, advanced surface topography metrology device that is specially designed with an enhanced resolution mode allowing precise control of nano-scale features of implementations that directly affects device performance. It has an optional ultra-fine 20nm stylus tip that ensures 45nm-generation surface profiling with inexpensive through-puts for vital transistor and interconnect functions. It features stylus-based surface profiling for cutting -edge 200mm operations, diamond styli down to 20nm radius and muffled platform for improved measurement sensitivity along with high resolution/high-aspect ratio. This surface topography profiling system delivers nanometer-scale stylus technology that complies with AFM resolution without any modeling requirements.