Profilometer optical - Alpha-Step IQ

Profilometer optical - Alpha-Step IQ
KLA - TENCOR The Alpha-Step IQ is a mechanical, stylus-based step profiler that can measure waviness, roughness, step heights up to 0.1%, save programs for later use, provide data analysis and image capture of scans. It features an advanced and customizable 2D surface profiling analysis capabilities, enables easy location measurement via saved site image with recipe, has an excellent surface profiling process repeatability and reproducibility. It precisely determines and analyzes thin step heights, surface microroughness and overall error forms on thin film surface coatings. Also, it offers sufficient vertical range for large topography variations, has multiple language support for users with a worldwide presence and enables faster surface profiling analysis routines by applying saved sets of analysis instructions.

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