Piezoelectric unit motion controller - C-702
The C-702 Hybrid System Controller is a high velocity-constancy for nanometer-precision hybrid DC/Piezo nanopositioning systems which is made for precision control of the M-511.HD and M-714 nanopositioning stages. This is used for high loads that can keep up a motion profile with nanometer position accuracy and high constancy of velocity. Both are based upon the PI hybrid drive technology which incorporates piezoelectric and motorized drive components that results to one motion and servo-control system. This can be applied on: surface inspection, microscopy, laser technology, interferometry and metrology.
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