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Vacuum-compatible positioning stage - max. 1.5 mm/s, max. 3 mm, max. 0.4 Nm | MS15
The MS15 series is manufactured by Mechonics, and is a piezo driven step motor that is incorporated with low hysteresis. It can handle reached position without current, which has a step width of 15 nm depending on the controller. There is a positioning accuracy that is better than 50 nm, which has a velocity of up to 1.5 mm/s.