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• Linear positioning stage / air bearing - 50 - 500 mm, max. 2 m/s | ABL1500 series

Linear positioning stage / air bearing - 50 - 500 mm, max. 2 m/s | ABL1500 series

ABL1500 Air-Bearing Direct-Drive Linear Stage is a semiconductor and data storage device that is designed for high performance scanning and inspection. It is compatible with 450mm wafer with active air pre load on all air bearing surfaces. There is also a linear encoder feedback that provides a sub nanometer resolution and high stiffness for heavy loads and excellent geometric performance which can go up to 500mm.

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