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• Linear motor-driven XY stage / compact - max. 300 x 300 mm, max. 1 000 mm/s | PlanarDL series

Linear motor-driven XY stage / compact - max. 300 x 300 mm, max. 1 000 mm/s | PlanarDL series

Aerotechs PlanarDL series are mechanical bearing, linear-motor stages are designed to deliver high geometric and dynamic performance. The PlanarDL has a compact low profile package combined with a number of travel option makes it an ideal solution for various applications such as ranging from surface profilometry to LED wafer scribing.

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