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Vacuum coating system - SE-300
Purpose:Deposition of Si3N4 and SiO2-based sealing coatings;
Deposition of transparent conducting coatings with improved characteristics.
Application:
OLED displays.
Vacuum system “Clean scanner is intended for display application. Vacuum coater SE-300 has been developed for obtaining new types of coatings, used in organic displays. These vacuum systems are particularly efficient in deposition of Si3N4- based thin-film sealing coatings and transparent conducting coatings with improved characteristics. Easy integration of vacuum coaters SE-300 in new and existing OLED displays’ production lines has been assured by using additional lock chamber, provided with individual high vacuum evacuation system and high-vacuum robot-manipulator
Features:
Ion-beam sputtering source with four-position unit of replaceable targets provides ample opportunities both for conducting research and production of thin-film structures having various composition and degree of complexity.
Application of ion -beam technologies from IZOVAC for deposition of coatings directly on organic structures without degradation of their characteristics have been successfully confirmed by our customers.
Very low level of particles generation in the course of coatings deposition is achieved owing to special design of ion sources movement mechanism, practically having no friction pairs;
Integration in research and production OLED lines is provided, if necessary, by a lock chamber with high-vacuum robotic loader;
Dimensions of processed substrates are 200x200 mm and 370x470mm;
Substrates’ heating can be set optionally;
Vacuum coater design complies with requirements for clean room of Class 1000.