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Decontamination machine wet / for LCD - LY4000/LN4000 Series
LY4000/LN4000 spin type cleaning system series is built to significantly reduce contamination while their line length of transfer by the chamber is designed for multiple operations in a single cup. Two of the best features in this series are the reduction of damages on glass substrate and prevention splashing mist during drying. These are just a few of the major tweaks from the older version. In addition, Hitachi developed this series with high level precision of cleaning of back surface side, in mind.
Further, the collection and recycling of most types of detergents can now be done with double cups.