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Roots vacuum pump / multi-stage - A3H Series
A3H dry pumps are meant for processes that are harsh and difficult. They are based on the Roots technology that is proven and of multistage. They can provide pump solutions in A3H series with various pumping speeds. These pumps are capable of providing better particle tolerance, condensation resistance and gas throughput than the previous version. The roots technology is capable of providing vacuum without any particles and dry. These sensors are also incorporated with flushing of inert gas and temperature sensors. It can provide an optimal solution for the processes that are much demanding. Dry pumps that come under A3H series are good to be used with CVD processes as they are made out of materials which are corrosion resistant. They are also featured with lower level of vibration and lower noise emission.