Ellipsometer spectroscopic - UV, VIS, N-IR, 45 – 90° | nanofilm_ep4

Ellipsometer spectroscopic - UV, VIS, N-IR, 45 – 90° | nanofilm_ep4
Accurion GmbH The nanofilm_ep4 uses a variety of unique features that allow the visualization of your surface in real time. You will see the structure of your sample on a microscopic scale and measure parameters like thickness, refractive index and absorption. Maps of selected areas can be received. Instrument combinations with other technologies like AFM, QCM-D, reflectometry, Raman spectroscopy, etc. are possible to receive even more information from your samples. The new generation of microscopic thin film, surface and materials metrology tool uses a combination of auto nulling ellipsometry and microscopy to enable surface characterization with lateral resolution as small as 1 micron. This enables resolving sample areas 1000 times smaller than most non-imaging ellipsometers, even if they use micro spot spectroscopic option.

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