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Ellipsometer laser
Ellipsometry is a method for determining the refractive index and extinction coefficients of a sample by measuring the change in polarization state of surface reflected light. Film thickness and optical constants of an adsorption layer or oxide film on a substrate surface can be determined with exceptional sensitivity. Conventional interference spectroscopy utilizes light passed through separate optical paths, while ellipsometry is a form of interferometry that uses two vibrational components with the same optical path, providing measurements with excellent accuracy and sensitivity.