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Scanning tunneling microscope / STM - attoSPHERE
The attoSPHERE is a scanning tunneling microscope, designed particularly for room temperature application in demanding conditions, including variable temperature environments and facilities with non-ideal mechanical damping. With its unique material combination, almost exclusively consisting of Invar and ceramics, and its thermally compensated cylindrical design, the attoSPHERE allows the user to obtain atomic resolution images in no time - even in non-ideal lab conditions. With its plug-andmeasure capabilities, the attoSPHERE is ideally suited for topographic and spectroscopic measurements, rapid process control, failure analysis in nanoelectronics, and fundamental research applications. The attoSPHERE is compatible with the highest class cleanrooms and high vacuum conditions.Principle - The attoSPHERE consists of a cylindrical microscope head which rests self-centered on a sample platform. The microscope head can simply be lifted off for rapid sample exchange. A specifi cally developed coarse positioner allows to approach the STM tip with highly repetitive steps of 75 nm size towards the sample. A fast feedback loop and high repition rates allow to conduct this coarse approach in a matter of minutes.