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• Air-cushion XY stage - max. 250 x 250 mm, max. 200 mm/s | ABL3600 series

Air-cushion XY stage - max. 250 x 250 mm, max. 200 mm/s | ABL3600 series

The Aerotech ABL3600 is a high performance staged designed with dual axis, large aperture, open frame, and air bearings. The units are an ideal solution for fulfilling the requirements of scanning microscopy, mask and wafer inspection applications.

The ABL3600 ensures unparalleled precision and accuracy to cost effectively increase production productivity.

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