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Air-cushion XY stage - 200 - 1 000 mm, max. 1.2 m/s | ABL8000 series
The leading-edge manufacturing process, particularly the semiconductor and data storage industries, emphasize on positioning tolerances that exceed the capability of conventional ball-screw and mechanical-bearing positioning systems. The ABL8000, with its air-on-air preload, exceptionally high stiffness and excellent geometric characteristics is specifically designed in line with these demands.