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PECVD deposition machine / vacuum - PentaBlue
PentaBlue is a PECVD (Plasma Enhanced Chemical Vapour Deposition) coating system where the wafers are coated with an antireflection layer consisting of silicon nitride. This technology uses a direct plasma reactor which achieves improved cell efficiency and higher density of Si-nitrate layer in comparison to the remote plasma reactor. The PentaBlue ensures an excellent surface passivation due to high process temperatures and the direct plasma process and guarantees a stable and reproducible process and is characterized by outstanding layer uniformity.