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CVD deposition machine / thin-film - ULS series
The ULS Series is a range of CVD deposition machine from Acxys. The standard module is designed for depositing non-stochiometric silicon oxide with the use of an organic metal precursor. It also allows other film components to be studied. The deposition hardware is founded on the ULS design and receives an add-on part enabling precursor injection.The machine provides think film deposition with either SiO2 or SiOx coatings. It can accommodate thickness from 50 to 1000 nm at a uniformity of +/- 2%. It also generates a medium to high processing speed. Furthermore, the machine is easy to use and can be easily installed on ULS hardware.