+7 (812) 645-08-06
Liquid evaporator - LU series
The HORIBA's liquid auto refill systems of the LU-A1000 series operate automatically, with waste-free materials, and are safe to use for liquid material baking systems (LSC) and injection systems (MI, MV, VC series). They are SEMI S2.S8.S14.CE compliant. They also contain an automatic remaining liquid purge sequence, offering safety before tank replacement. Maintenance process is easy and quick, minimizing downtime. They feature vapor pressure monitoring (checking the purge efficiency), load ceel monitoring, integrated gas system for size reduction, a degasifier module, emergency shutdown function, user-friendly touch panel, etc. They offer high quality automatic supply of liquid to various vapor applications, processes and systems.