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Silicone heating element / flexible - 200 °C
Gas line heaters by Watlows are made to regulate the gas lines temperatures for the prevention of condensation. Gases such as tetraethyl orthosilicate, boron trichloride, aluminum chloride, chlorine trifluoride, and dichlorosilane can be condensed and liquefied due to low temperatures during a phase shift. In the gas line the process of the semiconductor condensation will occur and it can puddle in the shower head prior to being injected in the vacuum chamber. Water defects can occur if the gases that are liquefied are injected in the same chamber. Condensation is prevented through the uniform heating of the lines. Typically, the TEOS lines can be heated up to 194 degrees Fahrenheit and it can depend on the flow rate and the pressure. Depending on the parameters of the process the optimum temperature.