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Magnetron cylindrical
Cylindrical Magnetrons is highly popular in the glass coating industry for its uniformity in thin films and reaching maximum target utilization. Recently, Angstrom Sciences has designed a new kind of cylindrical magnetron, compact, lightweight and economical and it is quite advantageous to flat panel display, solar cell, and web coating applications. Another noted fact of the patented profiled magnet technology is that it makes a deposition profile, which is closer to normal between the source and the substrate. This is known for reducing the debris accumulation on the chamber walls. The higher magnetic field intensity offered by Angstrom Sciences’ magnet array can help achieve typical deposition rates.