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Magnetron circular
The unit, which is manufactured by Angstrom Sciences, is a magnetron that is suitable for use in DC/IC targets in the sputtering industry. It has a compact, and circular design which makes it also acceptable in retrofit applications even in complex cluster assemblies for the tiniest vacuum chambers. The magnetron features a head with minimal impedance, which offers RF, DC, mid-frequency DC, pulsed DC, and microwave power compatibility.