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• Ellipsometer spectroscopic - 190 - 3 500 nm | SENresearch

Ellipsometer spectroscopic - 190 - 3 500 nm | SENresearch

The spectroscopic ellipsometer SENresearch measures thin film thickness, refractive index, extinction coefficient, and related properties of bulk materials, single layers, and multi‑layer stacks. Isotropic and anisotropic materials, surface and interface roughness as well as gradients can be analyzed. Furthermore, SpectraRay/3, SENTECH proprietary ellipsometer software, treats sample effects like depolarization, non-uniformity, scattering (Mueller-matrix), and backside reflection.

The SENresearch represents the high end of SENTECH spectroscopic ellipsometers. The compact table top instrument comprises the ellipsometer optics, goniometer, sample platform, auto-collimating telescope, light source, and detection unit. It can be extended
The SENresearch is focused on speed and accuracy for insitu and exsitu measurements of thin films wherever they are applied. Applications range from measuring on textured surfaces to determining the conductivity of TCO films, from insitu monitoring of deposition processes to offline mapping on large glass panels. With the latest development launched by SENTECH, magneto‑optical properties can be characterized. For a large variety of applications predefined recipes are offered by SpectraRay/3 for spectroscopic ellipsometer.

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