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Inverted microscope - iPHEMOS-TP
The iPHEMOS-TP of HAMAMATSU is an inverted emission microscope designed to analyze semiconductor wafers at its back. It is integrated with a semi-automatic, backside emission prober station enabling it to handle 300 mm wafers with high speed, and high accuracy. It is integrated with an automatic wafer measurement software that provides a broad range backside analysis. It also features multiple platforms, and a wide variety of options for a number of laser applications. It has a robust, flexible design as it is capable of having up to 3 detectors per unit. It also features a simplified operation system, and can be upgraded easily with several options. Its light collection capability and resolution can be upgraded by using NanoLens as it increases the numerical aperture.