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3D microscope / optical - ContourGT InMotion™
Bruker ContourGT InMotion™ 3D optical microscope provides improved features for device motion analyses. It is the most dependable and comprehensive tool for characterizing the surface of dynamic MEMS as well as other micro-devices. The microscope incorporates the recent advances in white light interferometry technology. It performs 3D surface measurements of features in the range of 0.1nm to 10mm in height for devices as they actuate. The device combines a a proprietary stroboscopic technology with a high-performance software for data acquisition and vision analysis. In a single system it can deliver static and dynamic device measurements at the same time for frequencies ranging from 11Hz to 2.4MHz.
ContourGT InMotion provides researchers and manufacturers a dependable performance in characterization of resonant frequency, measurement of shape distortion and deflection, surface roughness, step heights and critical dimensions. It can provide a thorough failure analyses on a broad range of topographic features to improve device quality control and performance.