+7 (812) 645-08-06
Thermal mass flow meter / for gas - min. 3 sccm, max. 2500 slpm
The SLA5800 controllers and meters are engineered by the mass flow experts at Brooks Instrument to provide a configurable platform that is trusted to deliver processes for a broad range of applications, operating temperatures and pressures. With better zero drift specifications compared to competitive products, SLA5800 MFCs maintain factory calibration and accuracy longer. This zero stability specification is made possible by thermal flow measurement sensor designs.