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• Thermal mass flow controller / digital - min. 3 sccm, max. 50 slpm | SLA 7950, 7960

Thermal mass flow controller / digital - min. 3 sccm, max. 50 slpm | SLA 7950, 7960

TMF-SLA7950Brooks Model SLA7900 Series UHP digital thermal mass flow measurement and control products provide incomparable flexibility and performance. They are developed to match the latest 1-1/8” platform. The SL7900 Series utilizes the high accuracy of the TruCal process gas calibration system and Brooks’ proprietary control algorithm. Brook’s advanced metal seal valve that is resistant to process changes offers better control.

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