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Environmental monitoring system / for clean rooms - APR 4300
The APR 4300 exhibits reliable decontamination as well as protection from contamination. This product, complete with an Airborne Molecular Contamination (AMC) that reduces the yield and quality in the semiconductor production, fixes and protects 300 mm wafers and their transport boxes (FOUPs) on a molecular level. Absorption of contaminated inorganic and organic molecules are immensely prohibited. Queue times between processes can be optimized and increase the yield of a fab in this way.