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Auger spectrometer / high-resolution / high-sensitivity - 3 nm, ø 8 nm, 25 kV, 1 nA | JAMP-9510F
JEOL JAMP-9510F is a high specification Auger electron spectrometer featuring a hemispherical analyzer. It delivers a high throughput analysis of the state of chemical bonding at micro and nano areas. It also provides a Schottky electron gun of the field emission type, which is used also for EPMA. The electron gun can deliver image observation with a spatial resolution of 3nm. The analysis at high throughput is made possible due to its ability to provide stable electric current in large quantities. Insulators can be analyzed in ways which were earlier never considered possible. This is enabled by the high-accuracy at the eucentric stage of specimen. This feature combined with the ion gun of floating type makes the device highly versatile. Composition and chemical information of any specimen, including metals and insulation materials, can be obtained.
JAMP-9510F uses analyzers featuring variable energy resolution, which allows analyzing the chemical bonding state in high resolution. It also delivers highly sensitive mapping at a high speed.