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Auger spectrometer - PHI 710
The PHI 710 Scanning Auger Nanoprobe provides high performance Auger (AES) spectral analysis, Auger imaging, and sputter depth profiling of complex materials including: nanomaterials, catalysts, metals, and electronic devices.The 710's field emission electron source provides less than 3 nm dark space resolution for secondary electron imaging. The coaxial geometry of the 710’s electron column and Cylindrical Mirror Analyzer (CMA) enables high Auger sensitivity over a broad range collection angles ensuring rapid and complete analysis routine flat samples as well as samples with complex shapes or high surface roughness. A high energy resolution spectroscopy capability is available when needed.